A total of 4 short courses will be organised on Sunday 19 September: 2 parallel sessions in the morning (09:00 - 12:30) and 2 parallel sessions in the afternoon (13:30-17:00). Participants can register for 1 morning session and/or 1 afternoon session. Registration includes coffee break(s) and lunch. To register, please refer to the section Registration on this website.
Short course 1 (09:00-12:30)
MEMS Technologies and RF-MEMS
Flavio Giacomozzi (Bruno Kessler Foundation)
Short course content: An overview of RF MEMS processing. Main technologies used for devicerealization will be presented together with the basic lumped elements used to build complex RF circuits. Technological platforms integrating lumped elements and RF MEMS switches will also be introduced.
Flavio Giacomozzi graduated in Mechanical Engineering at the University of Padova in 1982. Since 1983 he is working at Fondazione Bruno Kessler, FBK (Former ITC- IRST), Trento Italy on fabrication technologies. Since 1996 he is working on the development of MEMS technologies and the realization of prototypes of several devices and sensors. On the last years he is working mainly on the fabrication of RF MEMS devices. He is author or co-author of more than 70 publications and in charge of several projects.
Short course 2 (09:00-12:30)
Nanostructure Fabrication by Beam Induced Deposition and Etching
Hans W.P. Koops (NaWoTec GmbH)
Short course content: An overwiew between past and present focused ion beam processing FIBIP, as well as focused electron beam processing FEBIP. Review on basics of particle sources and matter interaction for ions and electrons. For both fields precursors in use and characteristics of deposits and etching processes will also be presented. Early and todays' rapid prototyping for mechanical, optical and electronic nanostructured devices is presented.
Hans W.P. Koops is a doctor in physics and former chief scientist of NaWoTec GmbH, Rossdorf, Germany, who developed electron beam photomask repair. Dr. Koops research interest is among projection e-beam lithography also miniaturized electron optics especially electron beam induced processes for electronics and optics. He has written over 160 scientific papers including 58 patent applications and several book chapters. He is member of the committee of the International Vacuum Nanoelectronics Conference IVNC, the German Physical Society DPG, and of the German Engineers VDE.
Short course 3 (13:30-17:00)
Nano-imprint lithography and applications
Stella W. Pang (University of Michigan)
Short course content: Nanoimprint technology can greatly simplify the production of nanostructures by creating molds that can emboss intricate patterns onto various substrates and materials. Various nanoimprint technologies and systems will be reviewed including thermal, UV, and reversal nanoimprint. Applications of nanoimprint technology in electronic, photonic, storage, sensor, and biomedical areas will also be discussed.
Stella W. Pang is a professor in Electrical Engineering and Computer Science at the University of Michigan. Dr. Pang's research interests include nanofabrication technology for microelectromechanical, biomedical, microelectronic, and optical devices. She has over 300 technical papers, book chapters, and invited presentations and is the editor and author of 16 books, journals and conference proceedings. She is a Fellow of IEEE, ECS and AVS.
Short course 4 (13:30-17:00)
Advanced Plasma Etching
Erwine Pargon (LTM/CNRS)
Short course content: Plasma etching processes involved in CMOS fabrication become even more challenging with the decrease of CMOS devices dimensions, as well as the integration of new materials in the CMOS stack. The basics of plasma etching will be presented and the evolution of plasma etching processes and plasma reactors necessary to address the CMOS downscaling will also be discussed.
Erwine Pargon is a research scientist working at LTM/CNRS in Grenoble, France. Her current research focuses on the development and characterization of plasma etching processes involved in CMOS fabrication. She has authored and co-authored more than 20 papers in international reviews, and has participated to about 20 invited talks at international conferences.
