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Tutorial Courses (Sunday 19, September 2010)

• "MEMS Technologies and RFMEMS"
  Instructor: Dr. Flavio Giacomozzi, FBK-CMM Bruno Kessler Foundation – Trento, Italy
• “Nanostructure Fabrication by Beam Induced Deposition and Etching”
  Instructor: Dr. Hans Koops, Ober-Ramstadt , Germany
• "Nanoimprint lithography and applications”
  Instructor: Prof. Stella Pang, University of Michigan, USA
• “Advanced Plasma Etching”
  Instructor: Dr. Erwine Pargon, Laboratoire des Technologies de la Microelectronique,-Grenoble, France